3

Study of spiral growth on 4H-silicon carbide on-axis substrates

Année:
2017
Langue:
english
Fichier:
PDF, 1.08 MB
english, 2017
12

The Growth of 3-Inch 4H-SiC Si-Face Epitaxial Wafer with Vicinal Off-Angle

Année:
2013
Langue:
english
Fichier:
PDF, 460 KB
english, 2013